Stella original measuring system (ST/LST series) by the CAD data match-up method
Inspection system with high cost performance gLST Seriesh has been released
By new structure design, we could succeed to reduce system cost
Low cost inspection system which is possible to be customized correspond to needs of field has come into existence
@Expansion of function, customization ability
It introduces original element technology which is stored for many years while keeping structure of the existing system gST seriesh. It's possible to correspond to needs of field flexibly.
It's possible to prepare an inspect system correspond to needs of field flexibly by expansion of function and customization. For example, it's possible to use as a system which find out caribration value in the time of correspond to fine pattern by use of data caribration. Also, it's possible to inspect while recording data as a visual check assisted system. Of course, it's possible to operate some systems simultaneously.
ACompact, lightweight, and use any locations
LST series can be placed with use any location because it's compact and lightweight. For example, it can be placed on the desktop. Furthermore, it can be placed any place because of silent design.
ScaleF~100 or ~400
Measurement accuracy of line widthF1Êm(@~400)
Maximum board size
0.1 - 4.0 mm
[XY]310~410 mm@[Z]20 mm
Stepping-motor + ball screw
Closed loop by making use of linear scale
14 M pixels / Color CCD(4384~3288)
AC 100 V
The latest model of LST seriesFLST3040G
LST4050G is a low-cost model of measuring and AOI system. It is possible to customize functions upon request of field needs.
Concretely, it is possible to measure and inspect external dimensions of device, pitch of holes, slit width, corner R, external dimensions and angle of hole, and so on.
Also, it is possible to measure hole diameter of through-hole and non through-hole for NC hole application use.
Besides, it can be set up in any place because of compact size and light weight. For example, it can be used as a desk-top machine in the desk.
In general, while measuring work is done, it is necessary to prepare a measuring program such as teaching, input of measuring point, and so on. On the other hand, in LST3040G, it is possible to auto-manufacture a measuring program corresponds to the CAD data. Therefore, preparation of measuring is not necessary. Also, it is possible to treat a set of work from preparation of data to AOI continuously, because it is operated simultaneously with our software (Router Vision).
£Before calibration(left), after calibration(right)
Data analyzer system for etching calibration work appears on the scene
We have developed LST3040A system as an added value system of LST series, too.
It's an ultimate data analyzer for etching calibration work. In this system, first of all, a real substrate is wet-etched by making use of the CAD data (Gerber data). And then, calibration value is simulated by comparison of its etching result and the original CAD data. Customer wet-etches the substrate correspond to this feed-back result. As a result, etching treatment is optimized. Therefore, it is defined as an optimized tool for etching treatment.
Of course, in this system, it's possible to add measuring and inspection function as optional function.
£Etching simulation @
This is a first etching simulation sample. Users prepare some samples in advance.
@Etching treatment is performed by making use of the normal data (the CAD data), to estimate etching property.
AEtching result and some simulation results are compared, so that, an optimized data is selected in accordance with its result.
BThe original data (the CAD data) is calibrated automatically by feedback offset treatment which is gained in accordance with the original data and simulation data.
CEtching treatment is performed in accordance with feedback offset data, and then, its result is analyzed.
Stella Corporation has released new equipment LST4050AOI as reinforcement model of AOI function.
@AOI by CAD data comparison method
AMeasurement and AOI by use of color CCD/area camera
BPreparation time (from reading of CAD data to start of inspection) is fast same as 5 min and under
CCorrespond to various specific works, such as, the screen mask, wet etched thick Cu foil (from top angle and bottom angle)
ELight weight and compact size (Possible to use as a desktop machine)
Recognize top plane and bottom plane by use of color CCD
It's possible to inspect component pad at top plane and bottom plane @
It's possible to minimize occurrence of false defect @
It's suitable for thick Cu foil @
It's possible to optimize inspect in proportion as property of the work because of configuration of attribution by CAD data comparison
In general, in the wet etching process, pattern form after etching is not same as that of the original CAD data by shape change and ununiformed process. In this system, CAD data is automatically corrected in advance by calibration. As a result, false defect can be minimized.
Laser Plotter output film
DFR (before and after wet etching)
Wet etched thick Cu foil
High throughput AOI system was released for pilot-production and mass-production
Stella Corporation has released a high throughput AOI and measuring system gLST6050AOI-Twinh. Twin table is adopted in this system due to speeding up of AOI time. As a result, it's possible to correspond to pilot-production and mass-production line.
In this system, AOI and review can be efficiently done only 1 examiner. And also, not a monochrome line sensor camera but a color area sensor camera is built in. As a result, it's possible to divide into color changing, contrasting density, and top angle and bottom angle of cupper foil. Furthermore, influence of warpage of substrate can be minimized.
CAD LINK complete comparison method is adopted as an inspection algorithm. It's possible to inspect complicated shapes easily.
before etching process
after etching process
In addition, a lot of inspection objects such as before and after wet-etching, after hole making, and opening area can be corresponded.
Inspection resolution is 8Êm/4Êm/2Êm. Of course, it's possible to not only
automatically inspect open and short defect, pinhole defect, protrusion
defect, and so on, but also, measure dimension of fine pattern automatically.
AOI for Screen Mask use
@Detection capability of protrusion and defect is high same as 1Êm
AIt's possible to detect exogenous material and residual of emulsion, which are adhered to screen mesh
BDetect full-covered point by screen mesh in opening area of fine pattern
CDetect fine pinhole on emulsion
DDetection capability is not influenced by difference of color shade and contrasting density of emulsion
EEasy operation by alignment free
FThroughput of 100 ~ 100o size is high same as approximate 9 min (@0.7Êm pixel)
GIf twin table is built in by optional, throughput is greatly enhanced
ILight weight and compact size (Possible to use as a desktop machine)