| Work specification |
| Process area |
510mm x 610mm |
| Maximum board size |
610mm x 710mm |
| Thickness |
< 60㎜ |
| Stage specification |
| Stroke |
550㎜ x 650㎜ (Z: 60mm) |
| Division ability |
0.08um |
| Minimum display unit |
0.1um |
| Driving speed |
Max. 150㎜ / sec |
| Position accuracy |
+-5um |
| XY stage drive |
Stepping motor (micro-step control) |
| Camera specification |
| Camera |
1.3M pixels / Color CAMERA |
 |
| Scale |
Zoom lens 1x ～ 4x
Low magnification: 40x - 160x
Standard magnification: 80x - 320x |
| View range |
Low magnification:
about 8.0㎜ x 6.4㎜ - 2.0㎜ x 1.6㎜
Standard magnification:
about 4.0㎜ x 3.2㎜ - 1.0㎜ x 0.8㎜ |
| Illuminator |
Stage, Coaxial light, Ring |
| Machine specification |
| Size (WxDxH) |
1130㎜ x 1768㎜ x 1179㎜ |
 |
| Weight |
700㎏ |
| Power supply |
100V |
| Electricity consumption |
2 kVA |
